Filtered cathodic arc deposition with ion-species-selective bias

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Filtered cathodic arc deposition with ion-species-selective bias.

A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...

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Ultraviolet and visible Raman analysis of thin a-C films grown by filtered cathodic arc deposition

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ژورنال

عنوان ژورنال: Review of Scientific Instruments

سال: 2007

ISSN: 0034-6748,1089-7623

DOI: 10.1063/1.2745229